X-Pact® Laser Off-Gas

Maintenance free and fast process gas measurement

Challenges

  • Gas extraction – under heated conditions
  • Gas preparation – filtering, spark arresting and cooling
  • Endpoint detection for process models

Solution

  • “In Situ” laser based gas measurement

Technical advantages

  • Maintenance free solution with no gas extraction and gas preparation
  • Very fast gas sampling < 1s
  • No gas preparation room required

Productivity

  • Improved model response due to fast process feedback
  • Higher System availability
  • Lowest OPEX (maintenance)